Touch Panel Mask 規(guī)格
1、Mask size (Unit: mm)
Soda Lime | Quartz |
420×520×3.0/4.8 | 420×520×5.0 |
450×550×3.0/4.8 | 450×550×5.0 |
508×609.6×4.8 | 508×609.6×5.0 |
620×720×7.8 | 700×800×8.0 |
700×800×7.8 | 800×920×8.0 |
800×860×7.8 | 800×960×8.0 |
850×1200×9.8 | 850×1200×10.0 |
850×1400×9.8 | 850×1400×10.0 |
2、Soda lime Mask Specification (Unit: um)
Grade | E | D | C | B | A |
Node | In cell/On cell | On cell | OGS | OGS/ (G/G) | OGS (G/F) |
CD | ±0.50 | ±0.75 | ±1.0 | ±1.5 | ±2.0 |
Total Pitch | ±1.5 | ±1.5 | ±2.0 | ±3.0 | ±3.0 |
Defect | <5.0 | <5.0 | <5.0 | <10.0 | <10.0 |
3、Quartz Mask Specification (Unit: um)
Grade | E | D | C | B | A |
Node | In cell | In cell/On cell | On cell | On cell/OGS | OGS |
CD | ±0.35 | ±0.50 | ±0.50 | ±0.75 | ±1.0 |
Total Pitch | ±0.75 | ±0.75 | ±1.0 | ±1.0 | ±2.0 |
Defect | <3.0 | <5.0 | <5.0 | <5.0 | <5.0 |